منابع مشابه
Maskless photolithography using UV LEDs.
A UV light emitting diode (LED) with a maximum output of 372 nm was collimated using a pinhole and a small plastic tube and focused using a microscope objective onto a substrate for direct lithographic patterning of the photoresist. Movement of the substrate with a motorised linear stage (syringe pump) allowed lines in SU-8 to be pattered with a width down to 35 microm at a linear velocity of 8...
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I have given, it has been around thirty years ago, in the Mémoires de l’Académie des Sciences1, the theory of generating functions and that of the approximation of formulas which are functions of large numbers. The first has for object the relations of the coefficients of the powers of an undetermined variable in the development of a function of this variable to the function itself. From the si...
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HAL is a multi-disciplinary open access archive for the deposit and dissemination of scientific research documents, whether they are published or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers. L’archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau...
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ژورنال
عنوان ژورنال: Photoniques
سال: 2021
ISSN: 1629-4475,2269-8418
DOI: 10.1051/photon/202110648